Wavefront metrology for Wafer-level optics

Precise and efficient

When inspecting optics at wafer level, in addition to precision, efficiency is of utmost importance, as a large number of optics must be checked and documented within the shortest possible period of time. Consequently, for reasons of economy, the inspection of wafer-level optics must therefore be automated.

Wavefront measurement technology is applied, for example, to check the image quality of individual lenses that are later used in smartphone lenses. Their tools and master molds are also inspected, e.g. by measuring the 3D surface shape through incident light.

Another example can be found in the inspection of microlenses with diameters down to 50 µm.

Fast and highly-automated

The wavefront measurement is based on a single camera image and is therefore very fast, and offers high intrinsic stability. Optocrafts measurement modules are a powerful, fully automated measurement solution for high volume production. The flexible communication interfaces supplied with the Shack-Hartmann software SHSWorks allow for a simple and fast integration into production lines, both mechanically and in terms of software.

Our solution for the inspection of wafer-level optics

Systems and modules of the SHSInspect family measure the transmitted wavefront, PSF and MTF. Moreover, they provide information on chromatic aberrations, focal length and polarization effects and enable measurements at field points. SHSLab wavefront sensors deliver fast and precise measurements at a wide range of wavelengths.

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